Target based on molybdenum and production method with thermal projection of a target
The invention relates to a target of nominal thickness, comprising at least one compound based on molybdenum, said target being characterised in that it has a lamellar microstructure, an oxygen rate lower than 1000 ppm, preferably lower than 600 ppm, and especially preferably lower than 450 ppm, an...
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Main Author | |
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Format | Patent |
Language | English |
Published |
19.05.2016
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Subjects | |
Online Access | Get full text |
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Summary: | The invention relates to a target of nominal thickness, comprising at least one compound based on molybdenum, said target being characterised in that it has a lamellar microstructure, an oxygen rate lower than 1000 ppm, preferably lower than 600 ppm, and especially preferably lower than 450 ppm, an electrical resistance of less than 5 times, preferably 3 times, and especially preferably twice the theoretical electrical resistance of the compound. |
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Bibliography: | Application Number: AU20100233525 |