Target based on molybdenum and production method with thermal projection of a target

The invention relates to a target of nominal thickness, comprising at least one compound based on molybdenum, said target being characterised in that it has a lamellar microstructure, an oxygen rate lower than 1000 ppm, preferably lower than 600 ppm, and especially preferably lower than 450 ppm, an...

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Bibliographic Details
Main Author BILLIERES, DOMINIQUE
Format Patent
LanguageEnglish
Published 19.05.2016
Subjects
CHEMICAL SURFACE TREATMENT
CHEMISTRY
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING MATERIAL WITH METALLIC MATERIAL
COATING METALLIC MATERIAL
DIFFUSION TREATMENT OF METALLIC MATERIAL
INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL
METALLURGY
SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Summary:The invention relates to a target of nominal thickness, comprising at least one compound based on molybdenum, said target being characterised in that it has a lamellar microstructure, an oxygen rate lower than 1000 ppm, preferably lower than 600 ppm, and especially preferably lower than 450 ppm, an electrical resistance of less than 5 times, preferably 3 times, and especially preferably twice the theoretical electrical resistance of the compound.
Bibliography:Application Number: AU20100233525