METHOD AND DEVICE FOR PROTECTING ELECTRONIC, OPTOELECTRONIC AND/OR ELECTROMECHANICAL MICROCOMPONENTS

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Bibliographic Details
Main Authors MYRIAM TOURNAIRE, AMALIA GARNIER, FRANCOIS, REGIS VIAL, SYLVAIN PAINEAU, PHILIPPE SANDRI
Format Patent
LanguageEnglish
Published 02.09.2003
Edition7
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
SEMICONDUCTOR DEVICES
TRANSPORTING
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Bibliography:Application Number: AU20030222895