STROMÄNDERUNGSBEGRENZUNGSVORRICHTUNG

In a method of limiting the current (I out ) flowing between a plasma chamber (3) and a power supply (2), wherein the current change di/dt is limited if the current exceeds a predetermined current by a by a current change limiting device (7, 40) which is provided in the current path between the powe...

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Bibliographic Details
Main Authors OZIMEK, PAWEL, KLIMCZAK, ANDRZEJ, BUGYI, RAFAL
Format Patent
LanguageGerman
Published 15.03.2012
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Summary:In a method of limiting the current (I out ) flowing between a plasma chamber (3) and a power supply (2), wherein the current change di/dt is limited if the current exceeds a predetermined current by a by a current change limiting device (7, 40) which is provided in the current path between the power supply (2) and the plasma chamber (3).
Bibliography:Application Number: AT20070025085T