VORLÄUFER FÜR DIE FILMBILDUNG UND VERFAHREN ZUR BILDUNG EINES RUTHENIUMHALTIGEN FILMS

Precursor for ruthenium film deposition, comprising ruthenium tetroxide dissolved in at least one non-flammable solvent, preferably a fluorinated solvent having the general formula CxHyFzOtNu wherein: 2x+2<=y+z and 2<=x<=15 and z>y and t+u>=1 (t+u preferably equal to 1) x, y, and z be...

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Bibliographic Details
Main Authors GATINEAU, JULIEN, DUSSARRAT, CHRISTIAN, YANAGITA, KAZUTAKA
Format Patent
LanguageGerman
Published 15.12.2011
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Summary:Precursor for ruthenium film deposition, comprising ruthenium tetroxide dissolved in at least one non-flammable solvent, preferably a fluorinated solvent having the general formula CxHyFzOtNu wherein: 2x+2<=y+z and 2<=x<=15 and z>y and t+u>=1 (t+u preferably equal to 1) x, y, and z being positive integers equal to or greater than 1, t and u being integers greater than or equal to zero.
Bibliography:Application Number: AT20050789992T