VERFAHREN UND VORRICHTUNG ZUR HERSTELLUNG VON GRUPPE-IV-NANOPARTIKELN IN EINEM DURCHFLUSS- PLASMAREAKTOR

The present invention provides a radiofrequency plasma apparatus for the production of nanoparticles and method for producing nanoparticles using the apparatus. The apparatus is designed to provide high throughput and makes the continuous production of bulk quantities of high-quality crystalline nan...

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Bibliographic Details
Main Authors TERRY, MASON, KELMAN, MAXIM, SCHIFF, ERIC, LI, XUEGENG, ROGOJINA, ELENA, ALCANTARA, CHISTOPHER, VANHEUSDEN, KAREL
Format Patent
LanguageGerman
Published 15.02.2011
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Summary:The present invention provides a radiofrequency plasma apparatus for the production of nanoparticles and method for producing nanoparticles using the apparatus. The apparatus is designed to provide high throughput and makes the continuous production of bulk quantities of high-quality crystalline nanoparticles possible. The electrode assembly of the plasma apparatus includes an outer electrode and a central electrode arranged in a concentric relationship to define an annular flow channel between the electrodes.
Bibliography:Application Number: AT20080754979T