SELBSTEICHENDER DRUCKSENSOR
The device has a pressure sensor (1) provided with a sensing element (11) whose less thickness segment has a membrane (12) made of conducting silicon. The membrane is provided with a piezoelectric transducer (13) e.g. bipolar transistor, for transmitting a mechanical stress by an electric signal. A...
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Main Authors | , , |
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Format | Patent |
Language | German |
Published |
15.09.2010
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Online Access | Get full text |
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Summary: | The device has a pressure sensor (1) provided with a sensing element (11) whose less thickness segment has a membrane (12) made of conducting silicon. The membrane is provided with a piezoelectric transducer (13) e.g. bipolar transistor, for transmitting a mechanical stress by an electric signal. A non-deformable conducting substrate made of conducting silicon is separated from the element by an insulating element. An actuator (2) has a non-deformable base (21) and a polarizable surface (22). The sensor is placed above the actuator such that the membrane is at the upright of the surface. The actuator has a metal electrode (24) on a non-deformable insulating substrate made of insulating silicon and connected to a voltage source. |
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Bibliography: | Application Number: AT20080104806T |