HALBLEITERANORDNUNG MIT WEICHEN ELEKTRISCHEN ANSCHLÜSSEN, BAUTEIL DAMIT UND SEINE HERSTELLUNGSVERFAHREN

• Main Author: LUTZ, MICHAEL, A
• Format: Patent
• Language: German
• Published: 15.04.2006
• Edition: 7
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

A semiconductor device (e.g., a chip scale package or CSP) is described including multiple input/output (I/O) pads arranged on a surface of a semiconductor substrate, a compliant dielectric layer, an outer dielectric layer, and multiple electrically conductive, compliant interconnect bumps (i.e., compliant bumps). The compliant bumps may form electrical terminals of the semiconductor device. The compliant dielectric layer is positioned between the outer dielectric layer and the surface of the semiconductor substrate. The outer dielectric layer and the compliant dielectric both have multiple openings (i.e., holes) extending therethrough. Each of the compliant bumps is formed upon a different one of the I/O pads, and extends through a different one of the openings in the first compliant dielectric layer and the outer dielectric layer. Each of the compliant bumps includes an electrically conductive, compliant body, and an electrically conductive, solderable conductor element. The compliant bodies are positioned between the solderable conductor elements and corresponding I/O pads. The compliant bodies form mechanically flexible, electrically conductive paths between the solderable conductor elements and the corresponding I/O pads. The solderable conductor elements are solder wettable. Several methods for forming the semiconductor device are described. An apparatus including the semiconductor device is also described, as is a method for forming the apparatus.