Synthesis of SrSnO 3 thin films by pulsed laser deposition: Influence of substrate and deposition temperature
SrSnO 3 thin films were prepared by pulsed laser deposition on amorphous silica and single crystal substrates of R-sapphire, (100)LaAlO 3 and (100)SrTiO 3. High quality epitaxial (100) oriented films were obtained on LaAlO 3 and SrTiO 3 while a texture was revealed for films on sapphire deposited at...
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Published in | Thin solid films Vol. 519; no. 2; pp. 614 - 618 |
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Main Authors | , , , , , , , , , |
Format | Journal Article |
Language | English |
Published |
Elsevier B.V
2010
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Subjects | |
Online Access | Get full text |
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Summary: | SrSnO
3 thin films were prepared by pulsed laser deposition on amorphous silica and single crystal substrates of R-sapphire, (100)LaAlO
3 and (100)SrTiO
3. High quality epitaxial (100) oriented films were obtained on LaAlO
3 and SrTiO
3 while a texture was revealed for films on sapphire deposited at the same deposition temperature of 700
°C. Amorphous films were obtained on silica but a post annealing at 800
°C induced crystallization with a random orientation. The screening of deposition temperature showed epitaxial features on SrTiO
3 from 650
°C while no crystallization was observed at 600
°C. The influence of substrate and deposition temperature was confirmed by Scanning Electron Microscopy and Atomic Force Microscopy observations. |
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ISSN: | 0040-6090 1879-2731 |
DOI: | 10.1016/j.tsf.2010.07.092 |