Ozone sensors on the base of SnO 2 films deposited by spray pyrolysis

The gas-sensing properties of SnO 2-based thin films designed for ozone detection are discussed in this paper. The influence of film characteristics on sensor performance is analyzed. SnO 2 films with thickness 30–200 nm were deposited by spray pyrolysis. The SnO 2 films have a response to ozone tha...

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Bibliographic Details
Published inSensors and actuators. B, Chemical Vol. 120; no. 2; pp. 679 - 686
Main Authors Korotcenkov, G., Blinov, I., Ivanov, M., Stetter, J.R.
Format Journal Article
LanguageEnglish
Published Elsevier B.V 2007
Subjects
Film structure
Ozone
Response
Sensor
SnO 2
Spray pyrolysis
Response
SnO 2
Spray pyrolysis
Film structure
Ozone
Sensor
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Summary:The gas-sensing properties of SnO 2-based thin films designed for ozone detection are discussed in this paper. The influence of film characteristics on sensor performance is analyzed. SnO 2 films with thickness 30–200 nm were deposited by spray pyrolysis. The SnO 2 films have a response to ozone that is quantitative and rapid and sufficient for use in ozone control and monitoring applications. Sensor performance is compared with similarly prepared sensors fabricated from In 2O 3- and WO 3-based films. The mechanism of the processes controlling the sensor response characteristics is proposed. The data support our conclusion that the reaction with ozone using the SnO 2-film sensors is limited by the adsorption/desorption processes.
ISSN:0925-4005
1873-3077
DOI:10.1016/j.snb.2006.03.029