V 2O 4–PEPC composite based pressure sensor
In this study, V 2O 4–PEPC based pressure sensor was designed and fabricated by drop-casting the blend of V 2O 4–PEPC microcomposite thin films of vanadium oxide (V 2O 4) micropowder (10 wt.%) and poly-N-epoxypropylcarbazole, PEPC (2 wt.%) in benzol (1 ml) on steel substrates. The thickness of the V...
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Published in | Microelectronic engineering Vol. 88; no. 6; pp. 1037 - 1041 |
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Main Authors | , , , , , , |
Format | Journal Article |
Language | English |
Published |
Elsevier B.V
2011
|
Subjects | |
Online Access | Get full text |
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Summary: | In this study, V
2O
4–PEPC based pressure sensor was designed and fabricated by drop-casting the blend of V
2O
4–PEPC microcomposite thin films of vanadium oxide (V
2O
4) micropowder (10
wt.%) and poly-N-epoxypropylcarbazole, PEPC (2
wt.%) in benzol (1
ml) on steel substrates. The thickness of the V
2O
4–PEPC films was in the range of 20–40
μm. The DC resistance of the sensor was decreased in average by 24 times as the pressure was increased up to 11.7
kNm
−2. The resistance–pressure relationships were simulated. |
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ISSN: | 0167-9317 1873-5568 |
DOI: | 10.1016/j.mee.2011.01.074 |