Carbon doping of non-polar cubic GaN by CBr 4
Non-polar carbon-doped cubic GaN (c-GaN:C) films were grown by the plasma-assisted molecular beam epitaxy (MBE) using carbon tetra-bromide (CBr 4) as a carbon source. The growth was in-situ monitored by the reflection high-energy electron diffraction (RHEED) and for the atomic carbon detection quadr...
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Published in | Journal of crystal growth Vol. 311; no. 7; pp. 2039 - 2041 |
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Main Authors | , , , , , , |
Format | Journal Article |
Language | English |
Published |
Elsevier B.V
2009
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Subjects | |
Online Access | Get full text |
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Summary: | Non-polar carbon-doped cubic GaN (c-GaN:C) films were grown by the plasma-assisted molecular beam epitaxy (MBE) using carbon tetra-bromide (CBr
4) as a carbon source. The growth was in-situ monitored by the reflection high-energy electron diffraction (RHEED) and for the atomic carbon detection quadrupole mass spectrometry (QMS) was applied. Time-of-flight secondary ion mass spectroscopy (ToF-SIMS) was used to quantify the carbon incorporation behavior. The structural, morphological and optical properties of the epilayers were studied by high-resolution X-ray diffraction (HRXRD), atomic force microscopy (AFM) and photoluminescence (PL) measurements at room temperature and at 4
K. The electrical properties of c-GaN:C samples were determined by measuring the current–voltage (
I–
V) characteristics at room temperature. |
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ISSN: | 0022-0248 1873-5002 |
DOI: | 10.1016/j.jcrysgro.2008.11.013 |