Carbon doping of non-polar cubic GaN by CBr 4

Non-polar carbon-doped cubic GaN (c-GaN:C) films were grown by the plasma-assisted molecular beam epitaxy (MBE) using carbon tetra-bromide (CBr 4) as a carbon source. The growth was in-situ monitored by the reflection high-energy electron diffraction (RHEED) and for the atomic carbon detection quadr...

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Bibliographic Details
Published inJournal of crystal growth Vol. 311; no. 7; pp. 2039 - 2041
Main Authors As, D.J., Tschumak, E., Pöttgen, H., Kasdorf, O., Gerlach, J.W., Karl, H., Lischka, K.
Format Journal Article
LanguageEnglish
Published Elsevier B.V 2009
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Summary:Non-polar carbon-doped cubic GaN (c-GaN:C) films were grown by the plasma-assisted molecular beam epitaxy (MBE) using carbon tetra-bromide (CBr 4) as a carbon source. The growth was in-situ monitored by the reflection high-energy electron diffraction (RHEED) and for the atomic carbon detection quadrupole mass spectrometry (QMS) was applied. Time-of-flight secondary ion mass spectroscopy (ToF-SIMS) was used to quantify the carbon incorporation behavior. The structural, morphological and optical properties of the epilayers were studied by high-resolution X-ray diffraction (HRXRD), atomic force microscopy (AFM) and photoluminescence (PL) measurements at room temperature and at 4 K. The electrical properties of c-GaN:C samples were determined by measuring the current–voltage ( I– V) characteristics at room temperature.
ISSN:0022-0248
1873-5002
DOI:10.1016/j.jcrysgro.2008.11.013