Preparation and characterization of carbonate terminated polycrystalline Al 2O 3/Al films

X-ray photoelectron spectroscopy (XPS) was applied to investigate the surface reactivity of polycrystalline Al films in contact with a gas mixture of carbon dioxide and oxygen at room temperature. Based on the characterization of interactions between these substrates and the individual gases at sele...

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Bibliographic Details
Published inApplied surface science Vol. 252; no. 5; pp. 1959 - 1965
Main Authors Tornow, C., Noeske, P.-L.M., Dieckhoff, S., Wilken, R., Gärtner, K.
Format Journal Article
LanguageEnglish
Published Elsevier B.V 2005
Subjects
Aluminium surface
Carbon dioxide
Carbonate
Gas mixture
Oxygen
Aluminium surface
Oxygen
Gas mixture
Carbon dioxide
79.60.−i
Carbonate
81.65.Mq
82.65.My
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Summary:X-ray photoelectron spectroscopy (XPS) was applied to investigate the surface reactivity of polycrystalline Al films in contact with a gas mixture of carbon dioxide and oxygen at room temperature. Based on the characterization of interactions between these substrates and the individual gases at selected exposures, various surface functionalities were identified. Simultaneously dosing both carbon dioxide and oxygen is shown to create surface-terminating carbonate species, which contribute to inhibiting the formation of an Al 2O 3 layer. Finally, a reaction scheme is suggested to account for the observed dependence of surface group formation on the dosing conditions.
ISSN:0169-4332
1873-5584
DOI:10.1016/j.apsusc.2005.03.176