LiTaO 3 films with c-axis preferred orientation prepared on Si(111) substrate by sol–gel method

LiTaO 3 films with c-axis preferred orientation have been prepared on Si(111) substrates using sol–gel spin-coating and rapid thermal annealing. Hydrogen-terminated silicon surface, preheating temperature, and unidirectional heat flow during the heat treatment are essential factors for the c-axis te...

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Bibliographic Details
Published inMaterials letters Vol. 44; no. 3; pp. 125 - 129
Main Authors Cheng, S.D., Zhou, Y., Kam, C.H., Han, X.Q., Que, W.X., Lam, Y.L., Chan, Y.C., Oh, J.T., Gan, W.S.
Format Journal Article
LanguageEnglish
Published Elsevier B.V 2000
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Summary:LiTaO 3 films with c-axis preferred orientation have been prepared on Si(111) substrates using sol–gel spin-coating and rapid thermal annealing. Hydrogen-terminated silicon surface, preheating temperature, and unidirectional heat flow during the heat treatment are essential factors for the c-axis texture. The texture is useful in pyroelectric, metal-ferroelectric-semiconductor (MFS) nonvolatile memory, and integrated optics applications.
ISSN:0167-577X
1873-4979
DOI:10.1016/S0167-577X(00)00014-8