Interaction of atomic hydrogen, HS and H 2S on GaAs(100)

Gaseous D-atoms are evidenced to react directly with adsorbed HS species, forming HD(g) and S remaining on the surface or HDS desorbing from the surface. On the other hand, exposing a D-covered GaAs(100) surface to H 2S molecules causes a gradual decrease in the amount of adsorbed D-atoms and promot...

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Published inChemical physics letters Vol. 312; no. 2; pp. 149 - 154
Main Authors Zou, Z., Wei, X.M., Liu, Q.P., Huang, H.H., Sim, W.S., Xu, G.Q., Huan, C.H.A.
Format Journal Article
LanguageEnglish
Published Elsevier B.V 1999
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Summary:Gaseous D-atoms are evidenced to react directly with adsorbed HS species, forming HD(g) and S remaining on the surface or HDS desorbing from the surface. On the other hand, exposing a D-covered GaAs(100) surface to H 2S molecules causes a gradual decrease in the amount of adsorbed D-atoms and promotes the formation of HS(ad) without the observation of accompanying H(ad). The pure HS species covered surface generated by the coadsorption of H 2S and D-atoms may lead to a more efficient S-passivation upon thermal annealing.
ISSN:0009-2614
1873-4448
DOI:10.1016/S0009-2614(99)00900-8