Optical and electrical properties of reactively d.c. magnetron-sputtered In 2O 3:Sn films

The deposition of transparent conductive indium oxide doped with tin is investigated. Characterization of the d.c. magnetron-sputtered films shows that it is possible to obtain transparent conductive films from an InSn alloy by sputtering in a reactive atmosphere. This deposition method in combinat...

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Bibliographic Details
Published inThin solid films Vol. 121; no. 2; pp. 109 - 119
Main Authors Theuwissen, A.J.P., Declerck, G.J.
Format Journal Article
LanguageEnglish
Published Elsevier B.V 1984
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Summary:The deposition of transparent conductive indium oxide doped with tin is investigated. Characterization of the d.c. magnetron-sputtered films shows that it is possible to obtain transparent conductive films from an InSn alloy by sputtering in a reactive atmosphere. This deposition method in combination with an appropriate anneal results in a very low light absorption and a high electrical conductivity of the films. In this paper the two-step deposition technique and the electrical and optical properties of the deposited transparent and conductive layers are described.
ISSN:0040-6090
1879-2731
DOI:10.1016/0040-6090(84)90232-3