Investigation of High Precision Marine Pressure Sensor Based on Silicon-on-Sapphire

• Published in: Sensors & transducers Vol. 202; no. 7; pp. 46 - 50
• Main Authors: LI Hong-Zhi, JIA Wen-Juan, WU Sheng, ZHANG Ting, LAN Hui, LIAO He-Qin, ZOU Qiang
• Format: Journal Article
• Language: English
• Published: IFSA Publishing, S.L 01.07.2016
• Subjects: High precision pressure sensor; Marine integrated sensor; Sapphire substrate; Silicon resistance; Stress cup design
• ISSN: 2306-8515; 1726-5479

As one of parameter in marine hydrographic survey, seawater pressure plays an important role in marine research, tsunami forecast, and marine engineering equipment. In practical application, many marine parameters are also relative to pressure value, and its value is helpful to provide a complete data model. Therefore, it makes a demand for high performance of pressure sensor. In order to realize a long-term and high precision measurement, a marine pressure sensor based on silicon stain resistance is presented. This sensor applies the sapphire as substrate material to reduce the error caused by inconsistent deformation between sensitive component and substrate. A stress cup structure is designed to improve its sensitivity. By using a series of processing technology and packaging method, the structure of marine pressure sensor has a good mechanical strength and corrosion resistance. Considered that the output signal is affected by temperature drift, a new algorithm compensation is introduced. From experimental results, the output voltage of sensor is almost independent of temperature and the maximum error is controlled within 0.05 %. This high performance pressure sensor could bring a large application in marine detection.