Physical and chemical characterization of the surface and removal process of silicon carbide ceramics by femtosecond laser processing

• Published in: Jin gang shi yu mo liao mo ju gong cheng Vol. 44; no. 4; pp. 508 - 517
• Main Authors: Dongqu XU, Chengyong WANG, Cezhi DU, Feng DING, Xiaoyue HU
• Format: Journal Article
• Language: Chinese
• Published: Zhengzhou Research Institute for Abrasives & Grinding Co., Ltd 01.08.2024
• Subjects: ablation characteristics; femtosecond laser; micropores; removal process; sic ceramics

Objectives: Silicon carbide ceramics, as a typical hard and brittle material, are difficult to process, with challenges such as low efficiency, significant tool wear, and poor surface quality during processing. Ultrafast laser processing can effectively inhibit the processing damage, which is an imp...