Flexible Membrane LRC Strain Sensor Fabricated using MEMS Method

A new flexible inductor-resistor-capacitor (LRC) low-strain sensor design with conventional architectures of n-type doped hydrogenated amorphous silicon with metal-on-amorphous silicon contacts on flexible polyimide substrate is fabricated. The sensing elements are queried wirelessly by an RF spectr...

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Bibliographic Details
Published inSensors & transducers Vol. 91; no. 4; pp. 39 - 46
Main Authors Hee C. LIM, James ZUNINO III, John F. FEDERICI
Format Journal Article
LanguageEnglish
Published IFSA Publishing, S.L 01.04.2008
Subjects
Flexible substrate
Membrane
Wireless strain sensor
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Summary:A new flexible inductor-resistor-capacitor (LRC) low-strain sensor design with conventional architectures of n-type doped hydrogenated amorphous silicon with metal-on-amorphous silicon contacts on flexible polyimide substrate is fabricated. The sensing elements are queried wirelessly by an RF spectrum analyzer with tracking generator option installed. These low-strain sensors are subjected to repetitive strains/pressure testing. The LRC sensor’s measured resonant frequency shifts reveal a 3rd degree polynomial loading relationship.
ISSN:2306-8515
1726-5479