Mechanical Stresses in Vacuum Deposited Films of Ag, MgF 2 and ZnS
The film material is deposited at 10 -5 Torr onto a thin strip of mica clamped at one end, and the stress within the film is determined by observation of the bending of the strip. The total stress S and the mean stress per unit cross section of the film σ are given as functions of the film thickness...
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Published in | Japanese Journal of Applied Physics Vol. 3; no. S1; p. 340 |
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Main Authors | , , , , |
Format | Journal Article |
Language | English |
Published |
01.01.1964
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Online Access | Get full text |
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Summary: | The film material is deposited at 10
-5
Torr onto a thin strip of mica clamped at one end, and the stress within the film is determined by observation of the bending of the strip. The total stress
S
and the mean stress per unit cross section of the film σ are given as functions of the film thickness
d
up to a few thousands of ångströms taking the deposition rate as a parameter. The stress in MgF
2
films is tensile, σ assuming a maximum at a thickness (≈1,000 Å) which depends on the deposition rate. ZnS films deposited slowly (1–3 Å/s) exhibit tensile stress. If deposited at faster rates (8–17 Å/s) they show compressive stress in the range
d
<1,200 Å; above this thickness the stress becomes tensile. Silver films exhibit tensile stress, and σ assumes a maximum in the thickness range 100 to 200 Å where the crystallites coalesce to form a coherent film. |
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ISSN: | 0021-4922 1347-4065 |
DOI: | 10.7567/JJAPS.1S1.340 |