Picosun SUNALE ALD Systems for High Quality Nanocoatings - Bridging the Gap between R&D and Industrial Production

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Bibliographic Details
Published inMeeting abstracts (Electrochemical Society) Vol. MA2011-02; no. 26; p. 1860
Main Authors Toivola, Minna, Soininen, Pekka J., Lehto, Tero, Pilvi, Tero
Format Journal Article
LanguageEnglish
Published 01.08.2011
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ISSN:2151-2043
2151-2035
DOI:10.1149/MA2011-02/26/1860