Structural and Chemical Investigation of Annealed Al2O3 Films for Interpoly Dielectric Applications in Flash Memories

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Bibliographic Details
Published inMeeting abstracts (Electrochemical Society) Vol. MA2006-02; no. 22; p. 1107
Main Authors Alessandri, Mauro, Piagge, Rossella, Caniatti, Massimo, Del Vitto, Annalisa, Wiemer, Claudia, Pavia, Giuseppe, Alberici, Stefano, Bellandi, Enrico, Nale, Angeloclaudio
Format Journal Article
LanguageEnglish
Published 30.06.2006
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ISSN:2151-2043
2151-2035
DOI:10.1149/MA2006-02/22/1107