Area Dependence of Reliability Characteristics for Atomic Layer Deposition HfO 2 Film under Static and Dynamic Stress
Saved in:
Published in | ECS journal of solid state science and technology Vol. 2; no. 5; pp. N125 - N129 |
---|---|
Main Authors | , , , |
Format | Journal Article |
Language | English |
Published |
2013
|
Online Access | Get full text |
Cover
Loading…
ISSN: | 2162-8769 2162-8777 |
---|---|
DOI: | 10.1149/2.019305jss |