Application of mechanical stress for studying the interface properties of the Si-SiO 2 system

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Bibliographic Details
Published inProceedings of the IEEE Vol. 59; no. 2; pp. 317 - 318
Main Author Sivo, L.L.
Format Journal Article
LanguageEnglish
Published 1971
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ISSN:0018-9219
DOI:10.1109/PROC.1971.8160