Reduction of write current with improved thermal stability in GeSe 2 doped Sb 2 Te 3 films for phase change memory applications

Abstract Chalcogenide alloy-based semiconductors have gained significant attention in recent decades due to its applications in phase change memory (PCM). Sb 2 Te 3 has proven to be an alternative to Static and Dynamic Random Access Memory and can be a suitable candidate for commercial memory device...

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Bibliographic Details
Published inJournal of physics. D, Applied physics Vol. 57; no. 36; p. 365306
Main Authors Bhatt, Nidhi, Parveen, Shahin, Whab, Abdul, munga, Pumlian
Format Journal Article
LanguageEnglish
Published 13.09.2024
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Summary:Abstract Chalcogenide alloy-based semiconductors have gained significant attention in recent decades due to its applications in phase change memory (PCM). Sb 2 Te 3 has proven to be an alternative to Static and Dynamic Random Access Memory and can be a suitable candidate for commercial memory devices due to their fast switching speed. However, Sb 2 Te 3 suffers from low amorphous phase stability and high RESET current, which needs further improvement for high power efficiency. In this work, we have prepared (Sb 2 Te 3 ) 1− x (GeSe 2 ) x ( x = 0.06, 0.12, 0.18, 0.24, 0.3) films to investigate their PCM properties. The films showed a rise in transition temperature to transform from high resistive amorphous (RESET) to low resistive crystalline (SET) states with doping that leads to significant enhancement in amorphous phase stability. For 30% doping of GeSe 2 in Sb 2 Te 3 , the data retention temperature increases from 20.2 °C to 84.6 °C, and the resistance contrast also increases from 10 2 to 10 5 . The rise in electrical resistance with doping in the amorphous as well as crystalline states leads to a drop in threshold current ( I th ) from 3.5 to 0.8 mA. This also reduces the RESET and SET currents. By analyzing the samples using finite element method, it was found out that the high resistance materials produce more heat, resulting in a lower write current in an energy efficient PCM device.
ISSN:0022-3727
1361-6463
DOI:10.1088/1361-6463/ad5605