Low temperature processed CO 2 laser-assisted RF-sputtered GaN thin film for wide bandgap semiconductors

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Bibliographic Details
Published inJournal of Asian Ceramic Societies Vol. 11; no. 1; pp. 68 - 79
Main Authors Kim, Seoung-Hyoun, Jo, Chang-Hyeon, Bae, Min-Sung, Ichimura, Masaya, Koh, Jung-Hyuk
Format Journal Article
LanguageEnglish
Published 02.01.2023
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ISSN:2187-0764
2187-0764
DOI:10.1080/21870764.2022.2151102