Transmission Electron Microscopy of Silicon VLSI Circuits and Structures
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| Published in | Electronics + power Vol. 30; no. 8; p. 641 |
|---|---|
| Main Author | |
| Format | Journal Article |
| Language | English |
| Published |
1984
|
| Online Access | Get full text |
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| Author | Barber, D.J. |
|---|---|
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| DOI | 10.1049/ep.1984.0346 |
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| StartPage | 641 |
| Title | Transmission Electron Microscopy of Silicon VLSI Circuits and Structures |
| Volume | 30 |
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