Transmission Electron Microscopy of Silicon VLSI Circuits and Structures

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Bibliographic Details
Published inElectronics + power Vol. 30; no. 8; p. 641
Main Author Barber, D.J.
Format Journal Article
LanguageEnglish
Published 1984
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ISSN:0013-5127
DOI:10.1049/ep.1984.0346