Molecular Dynamics Study of the Formation of Porous Films by Room-Temperature Physical Vapor Deposition of Silica
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Published in | Journal of physical chemistry. C |
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Main Authors | , , , , |
Format | Journal Article |
Language | English |
Published |
30.09.2024
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Online Access | Get full text |
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ISSN: | 1932-7447 1932-7455 |
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DOI: | 10.1021/acs.jpcc.4c02198 |