Study of the temporal stability of the reflection coefficient in the vicinity of 58.4 nm of narrow-band Sc/Al mirrors with Si or ScN interlayers and a MoSi2 protective cap layer

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Bibliographic Details
Published inThin solid films Vol. 783; p. 140047
Main Authors Chkhalo, N.I., Drozdov, M.N., Lopatin, A.Ya, Luchin, V.I., Salashchenko, N.N., Zuev, S.Yu, Tsybin, N.N.
Format Journal Article
LanguageEnglish
Published 01.10.2023
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ISSN:0040-6090
DOI:10.1016/j.tsf.2023.140047