Current Monitoring-based Diagnosis of Drive Belt Degradation in Wafer-handling Robots

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Bibliographic Details
Published inInternational journal of precision engineering and manufacturing
Main Authors Goo, Heejae, Lee, Geunil, Kwon, Daeil
Format Journal Article
LanguageEnglish
Published 02.11.2024
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ISSN:2234-7593
2005-4602
DOI:10.1007/s12541-024-01159-5