Investigation of the surface topography for the characterization of microstructures of amorphous SiN x -coatings

Saved in:
Bibliographic Details
Published inAnalytical and bioanalytical chemistry Vol. 353; no. 3-4; pp. 364 - 368
Main Authors Zahn, W., Wuttke, W., Z sch, A.
Format Journal Article
LanguageEnglish
Published 01.10.1995
Online AccessGet full text

Cover

More Information
ISSN:1618-2642
1618-2650
DOI:10.1007/s0021653530364