Tunable Optical Properties of SiN x Thin Films by OES Monitoring in a Reactive RF Magnetron Plasma Tunable Optical Properties of SiN x Thin Films

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Bibliographic Details
Published inPlasma processes and polymers Vol. 13; no. 2; pp. 208 - 216
Main Authors Pana, Iulian, Vitelaru, Catalin, Zoita, Nicolae Catalin, Braic, Mariana
Format Journal Article
LanguageEnglish
Published 01.02.2016
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ISSN:1612-8850
DOI:10.1002/ppap.201400202