Epitaxial growth of MOCVD-derived YBCO films by modulation of Cu（tmhd）2 concentration

Metal-organic chemical vapor deposition was applied to fabricate YBa2Cu3OT-a （YBCO） films on singlecrystal LaA103 （001） substrates for its high deposition rate, easy adjustment on film composition, and low requirement on vacuum apparatus. The effects of Cu（tmhd）2 concentra- tion in the precursor on...

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Published in稀有金属：英文版 no. 1; pp. 70 - 74
Main Author Jie Xiong Fei Zhang Xin Liu Rui-Peng Zhao Xiao-Hui Zhao Bo-Wan Tao
Format Journal Article
LanguageEnglish
Published 2014
Subjects
MOCVD
YBCO薄膜
化学气相沉积法
扫描电子显微镜
生长浓度
衍生
调制
铜
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Summary:Metal-organic chemical vapor deposition was applied to fabricate YBa2Cu3OT-a （YBCO） films on singlecrystal LaA103 （001） substrates for its high deposition rate, easy adjustment on film composition, and low requirement on vacuum apparatus. The effects of Cu（tmhd）2 concentra- tion in the precursor on the properties of YBCO films were systematically investigated. X-ray diffraction （XRD） reveals that the mole ratio of Cu/Ba in the precursor from 0.77 to 0.97 is helpful to improve the crystallization and out-of-plane orientation of YBCO films; however, it hardly affects the inplane texture. Scanning electron microscope （SEM） shows the dense, crack-free but rough surface, on which there are Cu-O and Ba-Cu-O outgrowths identified by energy-dispersive spectrometer （EDS）. As the mole ratio of Cu/Ba increasing, the average size of Ba-Cu-O precipitates keeps increasing and the film composition becomes inhomoge- neous at the mole ratio of Cu/Ba of 0.97. The 250 nm thick YBCO film prepared at the mole ratio of Cu/Ba of 0.91 shows the critical current density （Jc） of 4.0 MA.cm-2 （77 K, 0 T）.
Bibliography:MOCVD; YBCO; Cu（tmhd）2 concentration;Cu/Ba ratio
Metal-organic chemical vapor deposition was applied to fabricate YBa2Cu3OT-a （YBCO） films on singlecrystal LaA103 （001） substrates for its high deposition rate, easy adjustment on film composition, and low requirement on vacuum apparatus. The effects of Cu（tmhd）2 concentra- tion in the precursor on the properties of YBCO films were systematically investigated. X-ray diffraction （XRD） reveals that the mole ratio of Cu/Ba in the precursor from 0.77 to 0.97 is helpful to improve the crystallization and out-of-plane orientation of YBCO films; however, it hardly affects the inplane texture. Scanning electron microscope （SEM） shows the dense, crack-free but rough surface, on which there are Cu-O and Ba-Cu-O outgrowths identified by energy-dispersive spectrometer （EDS）. As the mole ratio of Cu/Ba increasing, the average size of Ba-Cu-O precipitates keeps increasing and the film composition becomes inhomoge- neous at the mole ratio of Cu/Ba of 0.97. The 250 nm thick YBCO film prepared at the mole ratio of Cu/Ba of 0.91 shows the critical current density （Jc） of 4.0 MA.cm-2 （77 K, 0 T）.
11-2112/TF
ISSN:1001-0521
1867-7185