Research on Optical Properties and Collodion Micro-processing Characteristics of Thin Film

Colorless and transparent thin films of collodion are prepared on silicon wafers and K9 optical glass substrates by using spin-coating technique. The visible light transmittance, IR absorption spectra and optical constants of collodion thin film are measured by UV-3501 Spectrophotometer, Fourier tra...

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Bibliographic Details
Published in防务技术：英文版 no. 3; pp. 167 - 170
Main Author Chang-long CAI Xiong HAN Xiao-ling NIU Wei-guo LIU
Format Journal Article
LanguageEnglish
Published 2013
Subjects
傅里叶变换红外光谱仪
光学性能
加工特性
厚度测量系统
可见光透射率
火棉胶
红外吸收光谱
薄膜
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Summary:Colorless and transparent thin films of collodion are prepared on silicon wafers and K9 optical glass substrates by using spin-coating technique. The visible light transmittance, IR absorption spectra and optical constants of collodion thin film are measured by UV-3501 Spectrophotometer, Fourier transform infrared spectrometer （FFIR） and spectroscopic ellipsometry. The measured results show that its average visible light transmittance is 91.9%, and its average infrared absorptivity is better than 0.69/um. In the visible light region, the refractive index of collodion thin film changes in the range of 1.5--1.53, which accords with normal dispersion. The collodion films are etched using oxygen gas plasma. The surface morphology and thickness of etched thin film are measured by the polarizing microscope and MP-100S thickness measurement system, respectively. The results show that the collodion thin film is etched out in the oxygen gas plasma. Copyright ~ 2013, China Ordnance Society. Production and hosting by Elsevier B.V. All rights reserved.
Bibliography:10-1165/TJ
Colorless and transparent thin films of collodion are prepared on silicon wafers and K9 optical glass substrates by using spin-coating technique. The visible light transmittance, IR absorption spectra and optical constants of collodion thin film are measured by UV-3501 Spectrophotometer, Fourier transform infrared spectrometer （FFIR） and spectroscopic ellipsometry. The measured results show that its average visible light transmittance is 91.9%, and its average infrared absorptivity is better than 0.69/um. In the visible light region, the refractive index of collodion thin film changes in the range of 1.5--1.53, which accords with normal dispersion. The collodion films are etched using oxygen gas plasma. The surface morphology and thickness of etched thin film are measured by the polarizing microscope and MP-100S thickness measurement system, respectively. The results show that the collodion thin film is etched out in the oxygen gas plasma. Copyright ~ 2013, China Ordnance Society. Production and hosting by Elsevier B.V. All rights reserved.
Collodion thin film; Transmittance; Infrared absorptivity; Micro-processing
ISSN:2214-9147
2214-9147