锆钛酸铅厚膜驱动高机械品质因数微悬臂梁的制作与性能

采用溶胶-凝胶法与体硅微加工相结合的技术制作了2．5mm厚锆钛酸铅（Lead zirconate titanate，PZT）厚膜驱动的微悬臂梁。测试结果表明：该微悬臂梁的第一阶谐振频率约为199．63kHz，与理论计算结果非常吻合；在大气压强下测得的机械品质因数（Q值）可高达799。通过能量损耗机制分析认为：该PZT厚膜比薄膜有效弹性模量更大并且具有趋向于＂硬＂性压电材料的性质，因此有利于微悬臂梁Q值的增强。...

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Bibliographic Details
Published in硅酸盐学报 Vol. 42; no. 1; pp. 65 - 69
Main Author 赵全亮 李中翔 何广平 曹茂盛 王大伟 狄杰建
Format Journal Article
LanguageChinese
Published 2014
Subjects
厚膜
微悬臂梁
机械品质因数
锆钛酸铅
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Summary:采用溶胶-凝胶法与体硅微加工相结合的技术制作了2．5mm厚锆钛酸铅（Lead zirconate titanate，PZT）厚膜驱动的微悬臂梁。测试结果表明：该微悬臂梁的第一阶谐振频率约为199．63kHz，与理论计算结果非常吻合；在大气压强下测得的机械品质因数（Q值）可高达799。通过能量损耗机制分析认为：该PZT厚膜比薄膜有效弹性模量更大并且具有趋向于＂硬＂性压电材料的性质，因此有利于微悬臂梁Q值的增强。
Bibliography:A microeantilever actuated by 2.5-mm-thick lead zirconate titanate （PZT} film was fabricated by a bulk silicon mi- cromachining technique and a sol--gel route. The results show that the fundamental resonant frequency is 199.63 kHz, which is similar to the theoretical result. The mechanical quality factor （Q-factor） is 799 even under standard atmospheric pressure condition. According to the analysis of energy dissipation mechanism, the PZT thick film can improve the Q-factor of the re- sonator due to the great effective elastic modulus and the ＂hard＂ property. These results imply that the PZT thick film could have a promising application in high Q-factor mieroelectromechanical devices.
lead zirconate titanate; microcantilever; mechanical quality factor; thick film
ZHAOQuanliangI , LI Zhongxiang1 , HE Guangping1 , CAO Maosheng2, WANG Dawei1 , DI Jiejian1 （1. School of Electrical and Mechanical Engineering, North China University of Technology, Beijing 100144, China; 2. School of Materials Science and Engineering,
ISSN:0454-5648