A trilayer process for the fabrication of AI phase qubits

Herein we develop an Al/AlOx/Al trilayer process, feasible to fabricate complex circuits with wiring crossovers, for the preparation of A1 junctions and phase qubits. The AlOx layer is obtained by in situ thermal oxidation, which provides high-quality junction tunnel barriers. The A1 junctions show...

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Bibliographic Details
Published in中国科学：物理学、力学、天文学英文版 no. 12; pp. 2377 - 2380
Main Author XUE GuangMing YU HaiFeng TIAN Ye DENG Hui LIU WeiYang REN YuFeng YU HongWei ZHENG DongNing ZHAO ShiPing
Format Journal Article
LanguageEnglish
Published 2013
Subjects
三相
临界电流密度
制造
宏观量子隧道效应
氧化铝
相干动力学
量子比特
铝
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Summary:Herein we develop an Al/AlOx/Al trilayer process, feasible to fabricate complex circuits with wiring crossovers, for the preparation of A1 junctions and phase qubits. The AlOx layer is obtained by in situ thermal oxidation, which provides high-quality junction tunnel barriers. The A1 junctions show a considerably low leakage current and the Josephson critical current density can be conveniently controlled in the range of a few to above 100 A/cm2, which is favorable in the phase qubit application. Macroscopic quantum tunneling, energy spectrum, energy relaxation time, Rabi oscillation, and Ramsey interference of the A1 phase qubits are measured, demonstrating clearly quantum coherent dynamics with a timescale of 10 ns. Further improvements of the coherent dynamic properties of the device are discussed.
Bibliography:Josephson junction, trilayer process, superconducting qubit
11-5000/N
Herein we develop an Al/AlOx/Al trilayer process, feasible to fabricate complex circuits with wiring crossovers, for the preparation of A1 junctions and phase qubits. The AlOx layer is obtained by in situ thermal oxidation, which provides high-quality junction tunnel barriers. The A1 junctions show a considerably low leakage current and the Josephson critical current density can be conveniently controlled in the range of a few to above 100 A/cm2, which is favorable in the phase qubit application. Macroscopic quantum tunneling, energy spectrum, energy relaxation time, Rabi oscillation, and Ramsey interference of the A1 phase qubits are measured, demonstrating clearly quantum coherent dynamics with a timescale of 10 ns. Further improvements of the coherent dynamic properties of the device are discussed.
ISSN:1674-7348
1869-1927