Chlorine gas sensors using hybrid organic semiconductors of PANI/ZnPcCl_（16）

PANI/ZnPcCl_（16）（polyaniline doped with sulfosalicylic acid/hexadecachloro zinc phthalocyanine） powders were vacuum co-deposited onto Si substrates,where Pt interdigitated electrodes were made by micromachining.The PANI/ZnPcCl_（16） films were characterized and analyzed by SEM,and the influencing fac...

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Published inJournal of semiconductors no. 8; pp. 88 - 92
Main Author 雷廷平 施云波 吕文龙 刘洋 陶巍 袁鹏亮 林立伟 孙道恒 王立权
Format Journal Article
LanguageChinese
Published 2010
Subjects
扫描电镜分析
最佳真空
有机半导体
气体传感器
氯气
混合
聚苯胺
薄膜厚度
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Summary:PANI/ZnPcCl_（16）（polyaniline doped with sulfosalicylic acid/hexadecachloro zinc phthalocyanine） powders were vacuum co-deposited onto Si substrates,where Pt interdigitated electrodes were made by micromachining.The PANI/ZnPcCl_（16） films were characterized and analyzed by SEM,and the influencing factors on its intrinsic performance were analyzed and sensitivities of the sensors were investigated by exposure to chlorine（Cl_2） gas.The results showed that powders prepared with a stoichiometric ratio of（ZnPcCl_（16））_（0.6）（PANI）_（0.4） had a preferential sensitivity to Cl_2 gas, superior to those prepared otherwise;the optimal vacuum co-deposition conditions for the films are a substrate temperature of 160℃,an evaporation temperature of 425℃and a film thickness of 75 nm;elevating the operation temperature （above 100℃） or increasing the gas concentration（over 100 ppm） would improve the response characteristics,but there should be upper levels for each.Finally,the gas sensing mechanism of PANI/ZnPcCl_（16） films was a
Bibliography:chlorine gas sensors
TP212
TQ124.41
PANI/ZnPcCl_（16）
PANI/ZnPcCl_（16）; hybrid organic semiconductors; chlorine gas sensors; vacuum co-deposition
vacuum co-deposition
11-5781/TN
hybrid organic semiconductors
ISSN:1674-4926