High-Quality Planar high-Tc Josephson Junctions
Reproducible high-Tc Josephson junctions have been made in a rather simple two-step process using ion irradiation. A microbridge (1 to 5 ?m wide) is firstly designed by ion irradiating a c-axis-oriented YBa2Cu3O7-? film through a gold mask such as the non-protected part becomes insulating. A lower T...
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Main Authors | , , , , , |
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Format | Journal Article |
Language | English |
Published |
30.06.2005
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Subjects | |
Online Access | Get full text |
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Summary: | Reproducible high-Tc Josephson junctions have been made in a rather simple
two-step process using ion irradiation. A microbridge (1 to 5 ?m wide) is
firstly designed by ion irradiating a c-axis-oriented YBa2Cu3O7-? film through
a gold mask such as the non-protected part becomes insulating. A lower Tc part
is then defined within the bridge by irradiating with a much lower fluence
through a narrow slit (20 nm) opened in a standard electronic photoresist.
These planar junctions, whose settings can be finely tuned, exhibit
reproducible and nearly ideal Josephson characteristics. This process can be
used to produce complex Josephson circuits. |
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DOI: | 10.48550/arxiv.cond-mat/0506792 |