Hybrid acousto-nano-biosensor

The technology realizing two multi-scale structures on piezoelectric single crystal lithium niobate plate was developed. The system of interdigital electrodes for the acoustic delay line operating at the range 2-3 MHz was produced by using photolithography. This delay line was combined with the nano...

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Main Authors Kolesov, Vladimir V, Anisimkin, Vladimir V, Kuznetsova, Iren E, Soldatov, Eugenii S, Dagesyan, Sarkis A, Melnikov, Alexander E, Kashin, Vadim V, Smirnov, Andrey V
Format Conference Proceeding
LanguageEnglish
Published SPIE 15.03.2019
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Summary:The technology realizing two multi-scale structures on piezoelectric single crystal lithium niobate plate was developed. The system of interdigital electrodes for the acoustic delay line operating at the range 2-3 MHz was produced by using photolithography. This delay line was combined with the nanotransduces having size about 60-80 nm. These transducers were produced by using negative electron-beam nanolithography.
Bibliography:Conference Location: Zvenigorod, Russian Federation
Conference Date: 2018-10-01|2018-10-05
ISBN:9781510627093
151062709X
ISSN:0277-786X
DOI:10.1117/12.2521796