Megasonic Cleaning for Particle Removal

This chapter contains sections titled: Introduction Principles of Megasonic Cleaning Particle Removal Mechanisms During Megasonic Cleaning Types of Megasonic Systems Particle Removal and Feature Damage in Megasonic Cleaning Summary

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Bibliographic Details
Published inParticle Adhesion and Removal pp. 243 - 279
Main Authors Keswani, Manish, Balachandran, Rajesh, Deymier, Pierre
Format Book Chapter
LanguageEnglish
Published Hoboken, NJ, USA John Wiley & Sons, Inc 19.01.2015
Subjects
acoustic cavitation
acoustic streaming
Megasonic cleaning
particle removal
silicon wafer
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Summary:This chapter contains sections titled: Introduction Principles of Megasonic Cleaning Particle Removal Mechanisms During Megasonic Cleaning Types of Megasonic Systems Particle Removal and Feature Damage in Megasonic Cleaning Summary
ISBN:9781118831533
1118831535
DOI:10.1002/9781118831571.ch6