改进碲镉汞液相外延方法原位生长正组分梯度薄膜材料

TN213; 研究了液相外延生长条件对碲镉汞薄膜材料组分梯度的影响,建立了指导液相外延生长的理论模型.通过改变水平推舟液相外延工艺的汞损失速率,生长出具有正组分梯度的碲镉汞薄膜材料.针对这种特定条件下生长的碲镉汞外延薄膜,通过腐蚀减薄光谱测试与二次离子质谱测试证实了材料具有正组分梯度结构.与传统方法生长的具有负组分梯度的碲镉汞薄膜相比,这种薄膜材料具有相近的表面形貌与红外透射光谱曲线,且具有较高的晶体质量,其X射线衍射双晶摇摆曲线半峰全宽达到28.8 arcsec....

Full description

Saved in:
Bibliographic Details
Published in红外与毫米波学报 Vol. 43; no. 3; pp. 307 - 315
Main Authors 霍勤, 韩红强, 张诚, 焦翠灵, 王仍, 毛铖铭, 陆液, 陈心恬, 乔辉, 李向阳
Format Journal Article
LanguageChinese
Published 中国科学院上海技术物理研究所,上海 200083 01.06.2024
Subjects
碲镉汞
LPE
composition gradient
液相外延
组分梯度
二次离子质谱
SIMS
Hg1-xCdxTe
Online AccessGet full text
ISSN1001-9014
DOI10.11972/j.issn.1001-9014.2024.03.003

Cover

Abstract TN213; 研究了液相外延生长条件对碲镉汞薄膜材料组分梯度的影响,建立了指导液相外延生长的理论模型.通过改变水平推舟液相外延工艺的汞损失速率,生长出具有正组分梯度的碲镉汞薄膜材料.针对这种特定条件下生长的碲镉汞外延薄膜,通过腐蚀减薄光谱测试与二次离子质谱测试证实了材料具有正组分梯度结构.与传统方法生长的具有负组分梯度的碲镉汞薄膜相比,这种薄膜材料具有相近的表面形貌与红外透射光谱曲线,且具有较高的晶体质量,其X射线衍射双晶摇摆曲线半峰全宽达到28.8 arcsec.
AbstractList TN213; 研究了液相外延生长条件对碲镉汞薄膜材料组分梯度的影响,建立了指导液相外延生长的理论模型.通过改变水平推舟液相外延工艺的汞损失速率,生长出具有正组分梯度的碲镉汞薄膜材料.针对这种特定条件下生长的碲镉汞外延薄膜,通过腐蚀减薄光谱测试与二次离子质谱测试证实了材料具有正组分梯度结构.与传统方法生长的具有负组分梯度的碲镉汞薄膜相比,这种薄膜材料具有相近的表面形貌与红外透射光谱曲线,且具有较高的晶体质量,其X射线衍射双晶摇摆曲线半峰全宽达到28.8 arcsec.
Abstract_FL The influence of growth conditions of liquid phase epitaxy on the composition gradient of HgCdTe was stud-ied,and the growth model of liquid phase epitaxy(LPE)of HgCdTe was established.HgCdTe with positive composi-tion gradient was grown by slider liquid phase epitaxy by changing the mercury loss rate.The positive composition gra-dient structure of HgCdTe grown under the growth condition of specific mercury loss was confirmed by corrosion thin-ning spectrum and secondary ion mass spectrometry(SIMS).The experimental results show that the HgCdTe with posi-tive composition gradient had the similar surface morphology and infrared transmission spectrum curve to the traditional HgCdTe with negative composition gradient.It had high crystal quality,with a full width at half maximum(FWHM)of X-ray diffraction(XRD)double-crystal rocking curve of 28.8 arcsec.
Author 陈心恬
焦翠灵
霍勤
毛铖铭
张诚
韩红强
王仍
陆液
李向阳
乔辉
AuthorAffiliation 中国科学院上海技术物理研究所,上海 200083
AuthorAffiliation_xml – name: 中国科学院上海技术物理研究所,上海 200083
Author_FL MAO Cheng-Ming
HAN Hong-Qiang
LI Xiang-Yang
CHEN Xin-Tian
ZHANG Cheng
LU Ye
QIAO Hui
JIAO Cui-Ling
WANG Reng
HUO Qin
Author_FL_xml – sequence: 1
  fullname: HUO Qin
– sequence: 2
  fullname: HAN Hong-Qiang
– sequence: 3
  fullname: ZHANG Cheng
– sequence: 4
  fullname: JIAO Cui-Ling
– sequence: 5
  fullname: WANG Reng
– sequence: 6
  fullname: MAO Cheng-Ming
– sequence: 7
  fullname: LU Ye
– sequence: 8
  fullname: CHEN Xin-Tian
– sequence: 9
  fullname: QIAO Hui
– sequence: 10
  fullname: LI Xiang-Yang
Author_xml – sequence: 1
  fullname: 霍勤
– sequence: 2
  fullname: 韩红强
– sequence: 3
  fullname: 张诚
– sequence: 4
  fullname: 焦翠灵
– sequence: 5
  fullname: 王仍
– sequence: 6
  fullname: 毛铖铭
– sequence: 7
  fullname: 陆液
– sequence: 8
  fullname: 陈心恬
– sequence: 9
  fullname: 乔辉
– sequence: 10
  fullname: 李向阳
BookMark eNo9j01LAlEYRu_CIDN_RrSa6b33nY87y5DKQGhTa5mPe1OpERpC2ovUomjhDISVYNEuIgPJJPwzzR39FxlFqwPP4jycFZILm6EgZI2CTqljs42GXo-iUKcAVHOAGjoDZuiAOgDmSP5_XybFKKp7gBxsw7KcPCmr7ng27WWD4Ty-UK_3ajTMeu_pY5JORioZq7c4vep_fV5m3f48nqrnh2zSTs87avCSfjzNkvasc6vurlVys0qWpHsUieIfC-Rge2u_VNYqezu7pc2KFlFgqAUMBLNNhpxZaEkZWH7gSpMz6ntgcNMVNmfcdDhDIXx0KBcMHQQpDCmQBVgg67_elhtKNzysNpqnJ-HisVprndWOvZ9ywEU3fgM26GxK
ClassificationCodes TN213
ContentType Journal Article
Copyright Copyright © Wanfang Data Co. Ltd. All Rights Reserved.
Copyright_xml – notice: Copyright © Wanfang Data Co. Ltd. All Rights Reserved.
DBID 2B.
4A8
92I
93N
PSX
TCJ
DOI 10.11972/j.issn.1001-9014.2024.03.003
DatabaseName Wanfang Data Journals - Hong Kong
WANFANG Data Centre
Wanfang Data Journals
万方数据期刊 - 香港版
China Online Journals (COJ)
China Online Journals (COJ)
DatabaseTitleList
DeliveryMethod fulltext_linktorsrc
Discipline Applied Sciences
DocumentTitle_FL Improved liquid phase epitaxy method for in-situ growth of HgCdTe with positive composition gradient
EndPage 315
ExternalDocumentID hwyhmb202403003
GroupedDBID 2B.
4A8
5VS
5XA
5XJ
92H
92I
93N
ABJNI
ACGFS
AENEX
ALMA_UNASSIGNED_HOLDINGS
CW9
DU5
IPNFZ
KQ8
OK1
PSX
RIG
RNS
TCJ
TGT
U1G
U5S
ID FETCH-LOGICAL-s1023-d20e2752382636ffd6cdaf5821cb0485ae782859823eec3918e23930fe4fe32d3
ISSN 1001-9014
IngestDate Thu May 29 04:20:08 EDT 2025
IsPeerReviewed true
IsScholarly true
Issue 3
Keywords 碲镉汞
LPE
composition gradient
液相外延
组分梯度
二次离子质谱
SIMS
Hg1-xCdxTe
Language Chinese
LinkModel OpenURL
MergedId FETCHMERGED-LOGICAL-s1023-d20e2752382636ffd6cdaf5821cb0485ae782859823eec3918e23930fe4fe32d3
PageCount 9
ParticipantIDs wanfang_journals_hwyhmb202403003
PublicationCentury 2000
PublicationDate 2024-06-01
PublicationDateYYYYMMDD 2024-06-01
PublicationDate_xml – month: 06
  year: 2024
  text: 2024-06-01
  day: 01
PublicationDecade 2020
PublicationTitle 红外与毫米波学报
PublicationTitle_FL Journal of Infrared and Millimeter Waves
PublicationYear 2024
Publisher 中国科学院上海技术物理研究所,上海 200083
Publisher_xml – name: 中国科学院上海技术物理研究所,上海 200083
SSID ssib038074669
ssj0039469
ssib051375082
ssib007291925
ssib002806809
ssib023167203
ssib008143719
ssib000862495
Score 2.407232
Snippet TN213;...
SourceID wanfang
SourceType Aggregation Database
StartPage 307
Title 改进碲镉汞液相外延方法原位生长正组分梯度薄膜材料
URI https://d.wanfangdata.com.cn/periodical/hwyhmb202403003
Volume 43
hasFullText 1
inHoldings 1
isFullTextHit
isPrint
link http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnV1LaxRBEB5iBPHiW3yzB_u4cXZ6pqf72LM7S1AUhARyC_M0F1cwCWLOIehB8ZAsSNRAFG8iRgjGIPkJ_gl3NvkXVtV0dicqvi5D011T9VXV9lbNTHe1ZV1NssTjcZLXI6wz5HpJWo_zKKp7UYQfICMnpkU0N2-J8Un3-pQ3NXLoa2XV0vxcPJYs_HJfyf94FfrAr7hL9h88O2AKHdAG_8IVPAzXv_IxCwVTLgsUCyUL2kwFLPSZdljgsFAx5TGpkCZoMBVSQ9CQj5SBZKHHtMuUwEYQ4CgyFMQQrhw5wJAMmWqzEAS1mGzR7S71kAiQC8S6xTTHIeAjXbpLMkkMAY9ukwjNtECoIAJpiEA1SWiLKdtIL48y2s-YiadGJkO0LoKXpBFw1qQ16AiAS9iGuEXiQBbc7u3_sgh1k_QAjAGwPDAC7NQBkUGTDd9lmA5tI3gQrSojPuqEAn00CZJAD4Dyqi9WHHe4AIymglFGExz0CtlXg4kbFR0AmCI8peaa9AQovlFPlrZrkqF99HqpBdhUEiKAAz7DhjJuBhpc9tn8mSdWmbTLc39MuMIFcfghvBrPXF6Zt7wSnHh5vrDJc3i5jfbnEKp8h2IoShgbSBhDE5X1gPkwdxis6Jx58HDmbow0EDWw-u5hx_dp3cSN29V8X5izzoef9av14-BJr6EqAUZCNu8P6w06WLahsmwAD0twhRiMew0OCbAc1I_jyqUzLQdKHLHYvorXfqcg7eDr5FHnTiXZnDhhHTNPiTVdTvmT1sjCzCnruHlirJl4PHvaGi-Wt3Z3VvvrG3srj4sPr4rNjf7qp96bbm97s-huFR9Xek_Xvn150l9e21vZKd697m8v9h4tFevve5_f7nYXd5deFC-fFd3nZ6zJdjjRHK-bs1Hqs1hspZ46dub4HiTcjuAiz1ORpFGOu96TGIKyF2U-1aaUDs-yhKuGzLDYoZ1nbp5xJ-VnrdHOvU52zqqlthdHkMp7kRBuylMlUpWkcZbmaZbZsX3eqhljTJv_vtnpH9x94c8kF62jw0l2yRqduz-fXYZ8fi6-Qr-R70ZnuoM
linkProvider Colorado Alliance of Research Libraries
openUrl ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=%E6%94%B9%E8%BF%9B%E7%A2%B2%E9%95%89%E6%B1%9E%E6%B6%B2%E7%9B%B8%E5%A4%96%E5%BB%B6%E6%96%B9%E6%B3%95%E5%8E%9F%E4%BD%8D%E7%94%9F%E9%95%BF%E6%AD%A3%E7%BB%84%E5%88%86%E6%A2%AF%E5%BA%A6%E8%96%84%E8%86%9C%E6%9D%90%E6%96%99&rft.jtitle=%E7%BA%A2%E5%A4%96%E4%B8%8E%E6%AF%AB%E7%B1%B3%E6%B3%A2%E5%AD%A6%E6%8A%A5&rft.au=%E9%9C%8D%E5%8B%A4&rft.au=%E9%9F%A9%E7%BA%A2%E5%BC%BA&rft.au=%E5%BC%A0%E8%AF%9A&rft.au=%E7%84%A6%E7%BF%A0%E7%81%B5&rft.date=2024-06-01&rft.pub=%E4%B8%AD%E5%9B%BD%E7%A7%91%E5%AD%A6%E9%99%A2%E4%B8%8A%E6%B5%B7%E6%8A%80%E6%9C%AF%E7%89%A9%E7%90%86%E7%A0%94%E7%A9%B6%E6%89%80%2C%E4%B8%8A%E6%B5%B7+200083&rft.issn=1001-9014&rft.volume=43&rft.issue=3&rft.spage=307&rft.epage=315&rft_id=info:doi/10.11972%2Fj.issn.1001-9014.2024.03.003&rft.externalDocID=hwyhmb202403003
thumbnail_s http://utb.summon.serialssolutions.com/2.0.0/image/custom?url=http%3A%2F%2Fwww.wanfangdata.com.cn%2Fimages%2FPeriodicalImages%2Fhwyhmb%2Fhwyhmb.jpg