Thermodynamics of the formation of TiN from TiCl4-NH3-H2 on a patterned oxidized silicon substrate
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Published in | Journal of the Electrochemical Society Vol. 143; no. 10; pp. 3251 - 3256 |
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Main Authors | , , |
Format | Journal Article |
Language | English |
Published |
Pennington, NJ
Electrochemical Society
1996
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Subjects | |
Online Access | Get full text |
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ISSN: | 0013-4651 1945-7111 |
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DOI: | 10.1149/1.1837193 |