Feasibility Study on the Stylus Cleaning Method for Microstructure Measurement Using Supersonic Flow

In recent years, the number of three-dimensional parts with microstructures has increased. We have developed a measurement system that uses a small-diameter optical fiber stylus. When the stylus with foreign substances adhered to it is used for measurement, the measurement error is caused by the thi...

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Bibliographic Details
Published inInternational journal of automation technology Vol. 19; no. 5; pp. 871 - 876
Main Authors Murakami, Hiroshi, Beppu Shunsuke, Katsuki Akio, Shuzenji Kiyotaka
Format Journal Article
LanguageEnglish
Published Tokyo Fuji Technology Press Co. Ltd 01.09.2025
Subjects
Cleaning
Diameters
Feasibility studies
Microstructure
Optical fibers
Styli
Supersonic flow
Supersonic nozzles
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ISSN1881-7629
1883-8022
DOI10.20965/ijat.2025.p0871

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Summary:In recent years, the number of three-dimensional parts with microstructures has increased. We have developed a measurement system that uses a small-diameter optical fiber stylus. When the stylus with foreign substances adhered to it is used for measurement, the measurement error is caused by the thickness of the foreign substance when it is located between the stylus tip and the measured object. In this study, the feasibility of cleaning foreign substances adhering to the styli for microstructure measurement was investigated using supersonic flow. As a result, particles with a diameter of 2 µm adhering to a stylus with a diameter of 60 µm or more can be removed using a supersonic nozzle.
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ISSN:1881-7629
1883-8022
DOI:10.20965/ijat.2025.p0871