High cooling power density SiGe/Si micro-coolers

SiGe/Si superlattice micro-coolers are investigated experimentally. They can be monolithically integrated with Si-based microelectronic devices to achieve localised cooling and temperature control. Cooling by as much as 4.2K at 25°C and 12K at 200°C was measured on 3µm thick, 60 × 60µm^sup 2^ device...

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Bibliographic Details
Published inElectronics letters Vol. 37; no. 2; p. 1
Main Authors Fan, X, Zeng, G, Croke, E, LaBounty, C, Ahn, C C, Vashaee, D, Shakouri, A, Bowers, J E
Format Journal Article
LanguageEnglish
Published Stevenage John Wiley & Sons, Inc 18.01.2001
Subjects
Cooling
Density
Devices
Microelectronics
Silicon
Silicon germanides
Superlattices
Temperature control
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Summary:SiGe/Si superlattice micro-coolers are investigated experimentally. They can be monolithically integrated with Si-based microelectronic devices to achieve localised cooling and temperature control. Cooling by as much as 4.2K at 25°C and 12K at 200°C was measured on 3µm thick, 60 × 60µm^sup 2^ devices. This corresponds to maximum cooling power densities approaching kW/cm^sup 2^.
Bibliography:ObjectType-Article-1
SourceType-Scholarly Journals-1
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content type line 23
ISSN:0013-5194
1350-911X