High cleanliness of portable clean-unit-box to unite clean-unit system platforms (CUSPs) and CUSP units

As a platform for nano-science and technology, cleanliness in a compact and local clean environment, i.e. a portable clean-unit-box (CUP), is reported for establishing a large-scale network of an ultrahigh clean environment platform towards cross-disciplinary research. Analyses of experimental resul...

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Bibliographic Details
Published inElectronics letters Vol. 43; no. 24; p. 1
Main Authors Rahaman, Md D, Gomita, K, Kawaguchi, N, Kaiju, H, Kondo, K, Ishibashi, A
Format Journal Article
LanguageEnglish
Published Stevenage John Wiley & Sons, Inc 22.11.2007
Subjects
Cleaning
Cleanliness
Cusps
Nanostructure
Networks
Platforms
Portability
Transportation
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Summary:As a platform for nano-science and technology, cleanliness in a compact and local clean environment, i.e. a portable clean-unit-box (CUP), is reported for establishing a large-scale network of an ultrahigh clean environment platform towards cross-disciplinary research. Analyses of experimental results indicate that the CUP has cleanliness of ISO class ∼2, which is one order of magnitude better than the conventional wafer transportation cleanbox.
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content type line 23
ISSN:0013-5194
1350-911X