Development of a carbon cluster ion source with a hollow cathode

Carbon cluster ion beams were produced utilizing a monoplasmatoron ion source with carbon cold hollow cathodes. Changing the gas injection position of the hollow cathode caused the difference in intensities and species of extracted ions. The pure carbon cluster ion beams were successfully produced a...

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Bibliographic Details
Published inAIP conference proceedings Vol. 2011; no. 1
Main Authors Imamura, Yuta, Miyamoto, Naoki, Kasuya, Toshiro, Wada, Motoi
Format Journal Article Conference Proceeding
LanguageEnglish
Published Melville American Institute of Physics 21.09.2018
Subjects
Carbon
Clusters
Discharge
Gas injection
Gas pressure
Hollow cathodes
Ion beams
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Summary:Carbon cluster ion beams were produced utilizing a monoplasmatoron ion source with carbon cold hollow cathodes. Changing the gas injection position of the hollow cathode caused the difference in intensities and species of extracted ions. The pure carbon cluster ion beams were successfully produced at about 36 Pa Ar gas pressure in the ion source, 70 mA discharge current, 1 kV extraction voltage and focusing by an electrostatic lens system. The source operation was often limited by discharge extinction, possibly attributable to a rapid discharge pumping.
Bibliography:ObjectType-Conference Proceeding-1
SourceType-Conference Papers & Proceedings-1
content type line 21
ISSN:0094-243X
1551-7616
DOI:10.1063/1.5053374