Characterization of polymeric films by ellipsometry

The present results can be summarized as follows: Directional dependence of the ellipsometric parameters Psi and Delta measured by transmission and reflection techniques disappears with increasing film thickness. From the result of the tranmission measurement of 50 mu m thick PET film (Exhibiting ne...

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Bibliographic Details
Published inJournal of materials science letters Vol. 19; no. 8; pp. 679 - 681
Main Authors SVORCIK, V, TICHA, H, RYBKA, V, HNATOWICZ, V
Format Journal Article
LanguageEnglish
Published Dordrecht Kluwer Academic Publishers 2000
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Summary:The present results can be summarized as follows: Directional dependence of the ellipsometric parameters Psi and Delta measured by transmission and reflection techniques disappears with increasing film thickness. From the result of the tranmission measurement of 50 mu m thick PET film (Exhibiting negligible directional dependence) we calculated n=1.87plus/minus0.22 and epsilon sub r =3.60. For PE we obtained by the same procedure n=1.43plus/minus0.16 and epsilon sub r =2.06. It was shown by the transmission ellipsometry that an initially unoriented PE exhibits, after mechanical orientation, significant directional dependence of the ellipsometric parameters Psi and Delta . PS film prepared by the deposition from a solution of initially oriented PS exhibits no directional dependence of the ellipsometric parameters Psi and Delta .
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ISSN:0261-8028
DOI:10.1023/A:1006762728131