A Calibration Method of Compliant Planar Parallel Manipulator

• Published in: Intelligent Robotics and Applications Vol. 13014; pp. 257 - 266
• Main Authors: Lin, Jian-feng, Qi, Chen-kun, Wu, Yu-ze, Gao, Feng
• Format: Book Chapter
• Language: English
• Published: Switzerland Springer International Publishing AG 2021; Springer International Publishing
• Series: Lecture Notes in Computer Science
• Subjects: Finite element analysis; Flexure hinge; Micro-nano positioning manipulator; Stiffness calibration; Stiffness modeling
• ISBN: 9783030890971; 303089097X
• ISSN: 0302-9743; 1611-3349
• DOI: 10.1007/978-3-030-89098-8_24

Flexure hinge is usually used in micro-nano positioning parallel manipulator. High precision kinematics model is the basis of high performance control. In this paper, the stiffness modeling and calibration methods of 3-RPR micro-nano positioning parallel manipulator are studied. The kinematics model of the 3-RPR parallel manipulator is established and the stiffness model of the compliant mechanism is established based on the virtual work principle. Given the driving force vector of the branch chain, the output pose of the end-effector of the manipulator is obtained by finite element analysis. The parameters of the stiffness model are identified by the least square method. Compared with the theoretical results of the finite element model, the validity of the stiffness modeling and calibration methods is verified, which provides a theoretical basis for the experimental verification.