Acoustically actuated flextensional SixNy and single-crystal silicon 2-D micromachined ejector arrays

• Published in: IEEE transactions on semiconductor manufacturing Vol. 17; no. 4; pp. 517 - 524
• Main Authors: DEMIRCI, Utkan, YARALIOGLU, Goksen G, HAEGGSTRÖM, Edward, PERCIN, Gökhan, ERGUN, Sanli, KHURI-YAKUB, B. T
• Format: Journal Article
• Language: English
• Published: New York, NY Institute of Electrical and Electronics Engineers 01.11.2004; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: Applied sciences; Electronics; Exact sciences and technology; Microelectronic fabrication (materials and surfaces technology); Miscellaneous; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Semiconductors; Coating process; transducer; Deposition process; Integrated circuit manufacture; Microelectronic fabrication; Resonance frequency; Membrane; Silicon; Permittivity; Ultrasound; Microelectromechanical device; Wafer; Deposition; inkjet; Photoresist; Piezoelectric sensor; wafer coating; microelectromechanical systems (MEMS); Silicon nitride; Two dimensional model; Droplet; Single crystal; Frequency characteristic; Experimental result; droplet ejection; Ejector; Comparative study
• ISSN: 0894-6507; 1558-2345
• DOI: 10.1109/TSM.2004.835714

[...] it should be possible to repeatably build devices and to predict their dynamic characteristics.