Electrochemical lithography: fabrication of nanoscale Si tips by porous anodization of Al/Si wafer

Porous anodization of Al/Si wafer in sulfuric acid results in the formation of Si nanotips on the surface of Si substrate with ultrahigh packing density.

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Bibliographic Details
Published inChemical communications (Cambridge, England) no. 8; pp. 942 - 943
Main Authors Pu, L, Shi, Y, Zhu, J M, Bao, X M, Zhang, R, Zheng, Y D
Format Journal Article
LanguageEnglish
Published England 21.04.2004
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Summary:Porous anodization of Al/Si wafer in sulfuric acid results in the formation of Si nanotips on the surface of Si substrate with ultrahigh packing density.
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ISSN:1359-7345
DOI:10.1039/b315810a